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FEI (Thermo Fisher Scientific) Scios2 LoVac dual beam FEG/FIB SEM.Scios2

Electron Optics

Scios 2 LoVac features a pre-aligned electron optical column, which is optimized for high resolution and for beam stability. The main elements of the electron optical system are:

Source:Field emission gun assembly with Schottky emitter source. The assembly is optimized for high brightness/high current, providing low-noise imaging. The pre-alignment of the FEG ensures no mechanical alignment is required. Easy gun installation and maintenance is provided with Auto bake-out and Auto Start capabilities.

  • Objective Lens:Dual Objective combining field-free magnetic and electrostatic lenses, with a 60 degree geometry
  • Voltage: 350 eV to 30 keV (20 eV landing energy possible with  Beam Deceleration)
  • Beam Current: 1pA to 400nA
  • Resolution: at Optimum working distance 
  •  -  0.8 nm at 30 kV (STEM) 
  • -  1.0 nm at 30 kV (Trinity) 
  •  -  1.6 nm at 1 kV (Trinity) at eucentric working distance, 2.5 nm at 1 kV (Trinity)
  •  Ion optics:
  • Field emission focused ion beam optics with liquid Gallium ion emitter.
  •  -  Voltage: 500 V to 30 kV
  •  -  Beam current: 1.5 pA - 65 nA in 15 steps
  •  -  Resolution: 3.0 nm 
  •  EDAX SDD X-ray detector and EBSP camera.
  • Gatan cold stage
  • Low vacuum mode to 500Pa

NPGS electron-beam lithography system with high speed beam blanker.


Horiba labRAM HR Evolution Raman spectrometer / AIST-NT AFM with TERS

labRAM HR Evolution and AIST-NT AFM

  • Lasers: 532nm, 633nm, 785nm, 1064nm. Automated selection of laser and filters
  • Spectral mapping with stage control, DuoScan, or combination
  • 300g/mm and 1800g/mm gratings
  • Air cooled open electrode 1024 x 256 pixel CCD detector
  • LN2 cooled linear InGaAs array detector, 512 pixels
  • Lead Selenide single channel detector
  • Heating-cooling stage, -196C to 600C, integrated software control

AIST SPM with top and side view optics

  • 1300nm IR laser
  • Fully automated laser and photodiode alignment
  • XYZ closed loop scanner with scanning range of 100 x 100 x 15 microns
  • AFM modes: contact, semi-contact, non-contact, LFM, PFM, phase contrast, MFM, single-pass MFM, EFM, single-pass EFM, SKM, SCM
  • optical coupling to labRAM, fully automated
  • TERS mapping


 Tescan Vega3 SEM (thermionic emitter scanning electron microscope).Tescan Vega3

  • EDAX SDD X-ray microanalysis system with Octane Pro 10 sq. mm detector and TEAM software.



  • Up to 200 KV TEM
  • Schottky Field emitter
  • Point resolution = 0.24nm, Lattice resolution = 0.1nm
  • High resolution objective lens FL = 1.7mm
  • Fully computer-controlled, eucentric side-entry, high-stability CompuStage
  • Maximized tilts for any X, Y, Z, a, b combination
  • Low-background double-tilt holder
  • Heating-straining stage
  • Gatan OneView CMOS camera, 4,096 x 4,096 array, with drift correction.
  • Bruker X-ray detector (SDD).

Last Updated: 2/5/20